DRC Tutorial

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Description

MEMS Pro V3 Design Rule CheckerMEMSCAP Inc.Yiching LiangMarch 6, 2002Design Rules¤ Geometric constraints in layouts, limited by fabrication capability¤ Design rule sets: sets of rules for a specific fabrication process– Usually provided by foundries¤ To check a layout for design rule violations:– Define design rules– Run Design Rule Checker (DRC)¤ Mixed MEMS and IC design rule sets – All-angle support for MEMS2¤1Design Rule Checker Commands¤ Setup DRC– Sets up the design rules¤ DRC – Runs DRC on entire layout¤ DRC Box– Runs DRC on a selected (rectangular) region¤ Clear Error Layer– Removes error flags created by previous DRC3Setup DRC¤ Design rule definition– Graphical interface– Text file¤ Can be created, loaded from file, or imported from Dracula® rule set4¤2Design Rule Types¤ Types of design rules:– Minimum width– Exact width– Not exist– Overlap– Spacing– Surround– Extension5Minimum Width Rule¤ The Minimum width rule specifies the minimum width of all objects, in any direction, on the specified layer6¤3Exact Width Rule¤ The Exact width rule specifies the exact width of all objects on the named layer– The width of octagons is measured between parallel sides7Not Exist Rule¤ The Not exist rule specifies that no objects should exist on the named layer– Has no associated distance8¤4Overlap Rule¤ The Overlap rule specifies the minimum amount that an object on one layer must overlap an object on another layer ...

Informations

• Publié par: Chiev
• Nombre de lectures: 24
• Langue: English

Extrait

MEMS Pro V3 Design Rule Checker

MEMS C A P Inc.

Yiching Liang March 6, 2002

Design Rules ¨Geometric constraints in layouts, limited by fabrication capability ¨Design rule sets: sets of rules for a specific fabrication process – Usually provided by foundries ¨To check a layout for design rule violations: – Define design rules – Run Design Rule Checker (DRC) ¨Mixed MEMS and IC design rule sets – Allangle support for MEMS

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Design Rule Checker Commands ¨Setup DRC – Sets up the design rules ¨DRC – Runs DRC on entire layout ¨DRC Box – Runs DRC on a selected (rectangular) region ¨Clear Error Layer – Removes error flags created by previous DRC

Setup DRC ¨Design rule definition – Graphical interface – Text file ¨Can be created, loaded from file, or imported from Dracula® rule set

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Design Rule Types ¨Types of design rules: – Minimum width – Exact width – Not exist – Overlap – Spacing – Surround – Extension

Minimum Width Rule

¨TheMinimum widthrule specifies the minimum width of all objects, in any direction, on the specified layer

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Exact Width Rule ¨TheExact widthrule specifies the exact width of all objects on the named layer – The width of octagons is measured between parallel sides

Not Exist Rule ¨TheNot existrule specifies that no objects should exist on the named layer – Has no associated distance

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Overlap Rule ¨TheOverlaprule specifies the minimum amount that an object on one layer must overlap an object on another layer (when there is an overlap) – Objects with coincident edges are not considered a violation of overlap rule

Rule Distance

OK OK Violation OK OK OK

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Spacing Rule ¨TheSpacingrule specifies the minimum distance that should separate all pairs of objects either on the same layer or on two different layers

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Surround Rule ¨TheSurroundrule specifies that objects on one layer must be completely surrounded by objects on another layer by a minimum of the specified distance

Extension Rule ¨TheExtensionrule specifies the minimum amount that an object on one layer must extend beyond the edge of an object on another layer ¨Objects not considered violations – Have a coincident edge but are otherwise outside – Are entirely surrounded Rule Distance

OK OK OK Violation Violation OK

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Minimum width Spacing Surround

¨Ignore options: conditions where rule violations are NOT reported (rule exceptions)

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Ignore Options

DRC Tutorial

¨Goto File > Open – Browse to DRC.tdb – Click OK to open it – This is the layout for a pressure sensor

Rule is ignored if objects have Surround coincident edges

Applicable Rules

Intersections Rule is ignored if objects intersect If layer 1 completely Rule is ignored if an object on outside layer 2 one layer is completely outside of another layer 45 degree acute Portions of objects containing angles acute angles (<45°) are ignored

Description

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Surround

Spacing

Coincidences

Ignore Options

Setting Design Rules ¨Goto Tools > DRC > Setup – Initial setup contains just 1 DRC rule: A. Poly0 enclose anchor – We will add a 2 more rules to the list

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DRC Graphical User Interface ¨Rule set info; import/export ¨Rule name ¨Enable check box ¨Rule description ¨Rule types ¨Ignore options ¨Rule distance ¨Rule layer(s) ¨Rule list ¨Add/Delete rule buttons

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MEMS Tutorial  DRC

¨Add rules 2 and 3 as follows – Click “Add rule” button, then type in new values

Rule name

Enable Rule Type

Coincidences

Intersections

Layer1 outside layer2

45 degree acute angle

Rule distance (ums)

Layer 1 Layer 2

Running DRC

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A. Poly0 enclose anchor X Surround

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4 (ums) anchor poly0

¨Click OK to exit DRC setup ¨Error reporting options – Place error ports – Write errors to file File name: tutorial.drc ¨Bin size: 200 – Size of square grid to be checked individually – Affects DRC speed ¨Click OK to start DRC

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B. Poly1 enclose anchor X Surround

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4 (ums) anchor poly1

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C. Poly0 enclose metal X Surround

X 6 (ums) metal poly0

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DRC Results ¨Popup window shows that 4 errors are found – Click OK ¨Bins with errors are crossed out

Finding Errors

¨To list errors: – Goto File > Open, open tutorial.drc

¨4 Errors: – B: Poly1 encloses anchor by 4 um

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Fixing Errors

¨Zoom in to the poly1 box – Press Z, then draw a box around the poly1 box

¨The anchors need to be enclosed by poly1 by more than 4 ums (rule B)

Fixing Errors

¨Zoom in to the anchor on the left – Press Z, then drag a box around it ¨Error: anchor is only 2 ums away from the left edge of the poly1 box ¨To correct errors: – Select the anchor by right clicking it – Use the middle mouse button to drag the left edge 2 grid units to the right, so that it is 4 grid units away ¨Repeat for anchor on the right

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