EPNES Tutorial on MEMS BK

Description

Power Engineering concepts for Industrial Engineerseconcepor alTutorial on Micro Electro Mechanical Systems (MEMS)Bruce KimDepartment of Electrical Engineering, Arizona State University Arizona State UniversityArizona State University1Power Engineering concepts for Industrial Engineerseconcepor alMEMS! What is MEMS! Why MEMS! Applications! MEMS Fabrication! MEMS Packaging! ConclusionArizona State UniversityArizona State University2Power Engineering concepts for Industrial Engineerseconcepor alWHAT IS MEMS! MEMS CONTAINS COMPONENTS OF 1 MICROMETER TO 1 MILLIMETER! CONSTRUCTED TO ACHIEVE A CERTAIN ENGINEERING OR FUNCTIONS BY ELECTROMECHANICAL OR ELECTROCHEMICAL MEANS.Arizona State UniversityArizona State University3Power Engineering concepts for Industrial Engineerseconcepor alA MEMS structureArizona State UniversityArizona State University4Power Engineering concepts for Industrial Engineerseconcepor alA gear chain with a miteArizona State UniversityArizona State University5Power Engineering concepts for Industrial Engineerseconcepor alELEMENTS OF MEMS! TWO PRINCIPLE COMPONENTS! SENSING OR ACTUATING ELEMENT! SIGNAL TRANSDUCTION UNITArizona State UniversityArizona State University6Power Engineering concepts for Industrial Engineerseconcepor alMEMS AS MICROSENSORPowersupplyTrans ductionInput OutputMicro sensingunitsignal signalelementArizona State UniversityArizona State University7Power Engineering concepts for ...

Informations

• Publié par: Unko
• Nombre de lectures: 33
• Langue: Romanian

Extrait

Power Engineering concepts for Industrial Engineers

Tutorial on Micro Electro Mechanical Systems (MEMS)

Bruce Kim Department of Electrical Engineering, Arizona State University

Arizona State University

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Power Engineering concepts for Industrial Engineers

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What is MEMS

Why MEMS

Applications

MEMS Fabrication

MEMS Packaging

Conclusion

MEMS

Arizona State University

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Power Engineering concepts for Industrial Engineers

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WHAT IS MEMS

MEMS CONTAINS COMPONENTS OF 1 MICROMETER TO 1 MILLIMETER

CONSTRUCTED TO ACHIEVE A CERTAIN ENGINEERING OR FUNCTIONS BY  ELECTROMECHANICAL OR ELECTROCHEMICAL MEANS.

Arizona State University

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Power Engineering concepts for Industrial Engineers

A MEMS structure

Arizona State University

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Power Engineering concepts for Industrial Engineers

A gear chain with a mite

Arizona State University

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Power Engineering concepts for Industrial Engineers

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ELEMENTS OF MEMS

TWO PRINCIPLE COMPONENTS

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SENSING OR ACTUATING ELEMENT

SIGNAL TRANSDUCTION UNIT

Arizona State University

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Power Engineering concepts for Industrial Engineers

Input signal

MEMS AS MICROSENSOR

Micro sensing element

Power supply

Trans duction unit

Output signal

Arizona State University

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Power Engineering concepts for Industrial Engineers

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Background of MEMS

The first monolithic integrated piezo resistive pressure sensor was in 1971 at CWRU High volume commercial by National semiconductors in 1974 First capacitive pressure sensor was built in 1980

Arizona State University

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Power Engineering concepts for Industrial Engineers

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Small Size

Light Weight

Why MEMS

Enhanced performance and reliability !Array Of Devices Low Cost

High Integration

Added functionality

Arizona State University

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UNITS, 1000

5741 6844 7760 8816 10836 13980 18127 23514 30355 38792

129.7 124.4 119.25 110.83 103 94.16 86.3 79 72.47 66.86

744.6 851.7 925.4 977.1 1116.2 1316.3 1564.4 1857.6 2199.8 2593.8

YEAR

1990 1991 1992 1993 1994 1995 1996 1997 1998 1999

REVENUE,mil Avg unit lion $ price,$

Revenue growth Rate,%

30.5 14.4 8.6 5.6 14.2 17.9 18.9 18.7 18.4 17.9

TEKRAM  striIndunginal Eeesr EerowPrieeinngecnoc gn rof stp sity 10 SILICON BAES DIMRC OESSNRO izAr anotatSnU erevi

Power Engineering concepts for Industrial Engineers

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APPLICATIONS

In automotive Industries

Health care Industry

Aerospace Industry

Telecommunications

Arizona State University

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