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Take-Back and Recycling at Fujitsu, Status: 21.12.2011 Page 1 of 43 Take-back & Recycling of FUJITSU in the countries EMEA (Europe, the Middle East and Africa) Austria Luxembourg Belgium Malta Bulgaria The Netherlands Cyprus Norway Czech Republic Poland Denmark Portugal Estonia Romania Finland Slovakia France Slovenia Germany (Deutsch) South Africa Greece Spain Hungary Sweden Ireland Switzerland Italy Turkey Latvia United Kingdom Lithuania Americas North America APAC (Asia-Pacific) Australia Hong Kong India Japan New Zealand Philippines Singapore South Korea Taiwan
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EEL5225: Principles of MEMS
Transducers (Fall 2004)
Sensor and Actuator Technology
Agenda:
Classification
Transduction Mechanisms
MEMS System
MEMS Design Methodology
MEMS Design Specifications
Reading: Senturia, Ch. 2 pp. 15-28.
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004


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Classification
Transducer
Element that converts one form of energy to another.
May include
– sensors (for measurement)
– actuators (for doing work)
– displays
Microsensor or microactuator
a sensor or actuator that is manufactured using microfabrication
and micromachining techniques
Other microstructures that neither sense nor actuate.
Microchannels, micronozzles, microlenses, etc.
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
2Transduction Mechanisms
Taken from Smith, R.L. “Sensors”, The Electrical Engineering Handbook, Ed. Richard C. Dorf, Boca Raton, CRC Press LLC, 2000
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
3Transduction Mechanisms
Electrical
Mechanical
Piezoelectricity
Piezoresistivity
Resistive,
capacitive, and
inductive effects
Motorola’s integrated pressure sensor
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
4Transduction Mechanisms
Optical
Mechanical
Photoelastic
systems
(stress-induced
birefringence)
Interferometers
Sagnac effect
Tunable VCSELs
Doppler effect
JAMES S. HARRIS GROUP at Stanford University
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
5Transduction Mechanisms
bimorph
actuator
Mechanical
mirror
Thermal expansion
Thermal (bimetal strip, liquid-
and gas thermometers,
resonant frequency)
Radiometer effect
1mm
(light mill)
frame
mirror
mirror
metal
bimorph
z
actuators
oxide
silicon
poly-Si
silicon
x
Bimorph
substrate
actuator
Cross-sectional View
• Xie’s group at University of Florida
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
6„
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MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Modular MEMS system design
Sensor design
Actuator design
Interface design
Packaging design
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
7„
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MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
Actuators
WORLD
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Separate components
Signal attenuation
Noise
Packaging
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
8„
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Integrated sensors
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
9„
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Integrated microsystems
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
10