Transmission electron microscopic investigations of heteroepitaxial III/V semiconductor thin layer and quantum well structures [Elektronische Ressource] / vorgelegt von Igor Németh

Sujets

• Physik

Informations

• Publié par: philipps-universitat_marburg
• Publié le: 01 janvier 2008
• Nombre de lectures: 14
• Poids de l'ouvrage: 11 Mo

Extrait

olfenTPhilipps-Univransmissionacelectrongmicroscopicrer.inhvoestigationsIgorofhaftenheterodemepitaxialbIysikIMarburgI/Vgelsemiconductorvthinausla(Lahn)y(Dr.ernat)andFquanhtumereicwPhellderstructuresersit?tDISSERvTrAeTIONtzuronErlangungN?methdesWDoktorgradesMarburgder2008NaturwissensceitgutacVPD.omTFVacDr.h?ndlicbhabil.ereiclzhter:PhhysikderderPr?fung:PhiliDr.pps-UnivKerstinersit?toMarburgZwalshDissertationProf.angenommenUlricam:H?fer11.03.2008agErstgutacmhhente18.03.2008r:grLoundondonUnder.Con.ten.ts.List.ofDarkT.ables.7.List.of3.3.1.Figures.8.1..InbuertroSiduct34ion.1.2..F.undamen.t.als.5.2.1.dsCrystal.structurepretreatmen...............Mi...di.T...microscop.........eld.........3.1.1........3.1.2.......5.2.2..Challenges.of.Hetero.epitaxy..............tomi.......High.....APD.....3.3...............5comp2.2.1..Charge.neutralittiphasey.of5the.hete.roi.n.terface......wth...............Substrate......6.2.2.2..An3.1.3.tiphasewthdisorder............34.................Structural...............3.2.1..F.roscop7.2.2.3..Othe.r.planar.defects:39stacX-Rakingractionfaults,.microt.wins41.hniques.ti...........ransmission..11.2.2.4..Lattice.mismatc.h.-FieldRelaxation............46.TEM.anal.......3.3.3..of............12.2.2.5..Dier.ence.in.thermal.expansion.co.ecien.ts......32.Gro.metho..............13.2.2.6..In.terdiusion......32.Si.and.t...................33.Si.gro....................14.2.3..Theory.of.elec3.1.4.tronsurfacediraction..............................3.2..analysis..............14.2.4..Rened.structure.factor.c.al.c39ulAationc.orce.c.y.......................3.2.2..Resolution.y..(HRXRD)..27.2.4.1..V.alence.F3.2.3.orceecFieldfor(VFF)detec.on...................44.T.electron.y..............28.2.4.2..De.nsi45tDarkyTEMF.unctional.Theory.(DFT)....................3.3.2..eld.for.osition.ysis......29.3..Exp.erimen47talDarkMeimagingthanodomainsds.32.3.1..Crystal.gro.wth..48...Con.tenonsts.3.3.4..Con.v.ergeneent.bDetectioneam.electronhdiraction.(CBED)........tin.....menfassung......57.3.3.5..P.ol.arit{111}y.sensitiv.e.b.endtcon.toursharge.and.....of...vi...........samples...of.......stoic64.3.3.6..Dete5.2.2.ction.of.otherCorrelationplanarSidefects..Annihilation.......5.5..surface.....y...5.5.2........of....67and3.3.7..High-resolutionaryTEMendix.........TEM.......sec.....139.......The...............5.2.1.70{110}4..Quan.titativ.e.comp.ositionalnon-stoicanalysis.of.QW.s.b103yetDFTEMstructure80.4.1..Rened.structure104factorAPDscalculati.on.with.VFF.and.DFT....p.and.construction.......5.5.1..rst80-4.2.yGa(NAs)/GaAs....wth.olarit.........119.ev.planar.......5.7..n.wth.....6..7..A..A.1..................13884preparation4.3..Ga(NAs)/GaP..........A.2.1..on...........Plan.............143.structure.APBs......................85.4.4..Ga(P101As)/GaPThe.hiometric.APB...................101.The.hiometric.APB.................5.3..b.w.APD.and.surface......87.4.5..(BGa)P/GaP..5.4..of.............................109.Crystal.olari.y.Si.re...............115.Discon.uous89monola4.6.erGa(NP)/GaPc.neutralit.........116.Gro.conditions.p.y...................5.6..and.olution.other.defects.............121.Summary91optimized4.7.ucleationGa(AsSb)/GaAsgro.conditi.........130.Summ.132.Zusam.135.App.138.Abbre.ations................................92A.2.5.sampleHetero.epitaxy.and.defect.c.haracterization.(GaP.on.Si).94.5.1..Nucleation.of.GaP139onCrossSiti.sandwic.samples...................A.2.2..View..........................9465.2..List4.2.of.Taablesrs2.1..ThermalaroundexpansionVFFcoolaritecien.tsbof.semiconductorsn.iso-.d.....GaP.conditions...ate.DFT.....of13ond2.2.solatedVFFimpuritiesparameterslofDFTbinary.comp.ounds..5.1..of.y.gro.......7.d.y.........81.Strain.anion-catio.b29lengths3.1.iConsubstitutionaltrastelectricrulescforlcudynamicalateBragg-linesusingiandn.002.CBED.discs......81.P.y.the60la4.1.eKinematicand(002)wthelectr.o.n.form.factors.c.al120culGa(N As )x 1−x
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