EPNES Tutorial on MEMS BK
41 pages
Romanian

EPNES Tutorial on MEMS BK

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Power Engineering concepts for Industrial Engineerseconcepor alTutorial on Micro Electro Mechanical Systems (MEMS)Bruce KimDepartment of Electrical Engineering, Arizona State University Arizona State UniversityArizona State University1Power Engineering concepts for Industrial Engineerseconcepor alMEMS! What is MEMS! Why MEMS! Applications! MEMS Fabrication! MEMS Packaging! ConclusionArizona State UniversityArizona State University2Power Engineering concepts for Industrial Engineerseconcepor alWHAT IS MEMS! MEMS CONTAINS COMPONENTS OF 1 MICROMETER TO 1 MILLIMETER! CONSTRUCTED TO ACHIEVE A CERTAIN ENGINEERING OR FUNCTIONS BY ELECTROMECHANICAL OR ELECTROCHEMICAL MEANS.Arizona State UniversityArizona State University3Power Engineering concepts for Industrial Engineerseconcepor alA MEMS structureArizona State UniversityArizona State University4Power Engineering concepts for Industrial Engineerseconcepor alA gear chain with a miteArizona State UniversityArizona State University5Power Engineering concepts for Industrial Engineerseconcepor alELEMENTS OF MEMS! TWO PRINCIPLE COMPONENTS! SENSING OR ACTUATING ELEMENT! SIGNAL TRANSDUCTION UNITArizona State UniversityArizona State University6Power Engineering concepts for Industrial Engineerseconcepor alMEMS AS MICROSENSORPowersupplyTrans ductionInput OutputMicro sensingunitsignal signalelementArizona State UniversityArizona State University7Power Engineering concepts for ...

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Publié par
Nombre de lectures 33
Langue Romanian
Power Engineering concepts for Industrial Engineers
Tutorial on Micro Electro Mechanical Systems (MEMS)
Bruce Kim Department of Electrical Engineering, Arizona State University
Arizona State University
1
Power Engineering concepts for Industrial Engineers
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What is MEMS
Why MEMS
Applications
MEMS Fabrication
MEMS Packaging
Conclusion
MEMS
Arizona State University
2
Power Engineering concepts for Industrial Engineers
!
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WHAT IS MEMS
MEMS CONTAINS COMPONENTS OF 1 MICROMETER TO 1 MILLIMETER
CONSTRUCTED TO ACHIEVE A CERTAIN ENGINEERING OR FUNCTIONS BY ELECTROMECHANICAL OR ELECTROCHEMICAL MEANS.
Arizona State University
3
Power Engineering concepts for Industrial Engineers
A MEMS structure
Arizona State University
4
Power Engineering concepts for Industrial Engineers
A gear chain with a mite
Arizona State University
5
Power Engineering concepts for Industrial Engineers
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ELEMENTS OF MEMS
TWO PRINCIPLE COMPONENTS
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SENSING OR ACTUATING ELEMENT
SIGNAL TRANSDUCTION UNIT
Arizona State University
6
Power Engineering concepts for Industrial Engineers
Input signal
MEMS AS MICROSENSOR
Micro sensing element
Power supply
Trans duction unit
Output signal
Arizona State University
7
Power Engineering concepts for Industrial Engineers
! ! !
Background of MEMS
The first monolithic integrated piezo resistive pressure sensor was in 1971 at CWRU High volume commercial by National semiconductors in 1974 First capacitive pressure sensor was built in 1980
Arizona State University
8
Power Engineering concepts for Industrial Engineers
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Small Size
Light Weight
Why MEMS
Enhanced performance and reliability !Array Of Devices Low Cost
High Integration
Added functionality
Arizona State University
9
UNITS, 1000
5741 6844 7760 8816 10836 13980 18127 23514 30355 38792
129.7 124.4 119.25 110.83 103 94.16 86.3 79 72.47 66.86
744.6 851.7 925.4 977.1 1116.2 1316.3 1564.4 1857.6 2199.8 2593.8
YEAR
1990 1991 1992 1993 1994 1995 1996 1997 1998 1999
REVENUE,milAvg unit lion $price,$
Revenue growth Rate,%
30.5 14.4 8.6 5.6 14.2 17.9 18.9 18.7 18.4 17.9
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Power Engineering concepts for Industrial Engineers
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APPLICATIONS
In automotive Industries
Health care Industry
Aerospace Industry
Telecommunications
Arizona State University
11