▲▲▲▲▲▲▲▲▲▲▲▲▲® BENCHMARK 800-III ICPETCH and DEPOSITIONTHE AFFORDABLE HIGH-PERFORMANCE DRIE AND LOW TEMPERATURE PECVDPLASMA PROCESSING SYSTEMS®The BenchMark 800-III Inductively CoupledPlasma (ICP) Processing System from AXIC, Inc.defines a new concept in Deep Reactive Ion Etch(DRIE) and low temperature-low damage PlasmaEnhanced Chemical Vapor Deposition (ICPPECVD) plasma processing. The system is basedon a modular design starting with a universal cham-ber and cabinet unit with ICP etch and depositionbottom electrodes available for easy installation intothe chamber unit. We are confident you will findthe ease of use, variety of plasma processes, service-ability and attractive pricing of the BENCHMARK®800-III unsurpassed by any other plasma prod-uct in the market.SYSTEM DESCRIPTIONIn the research and development of plasma pro-cessing, there has always been a great need for ahighly versatile and reliable tool. With the ever-changing requirements in plasma research, the sys-tem selected must offer the widest range of processparameters and a high degree of repeatability forprocess verification. It also must be easily modi-fied for new process requirements. We believe that®our BENCHMARK 800-III ICP etch/deposition plasma system satisfies these very demanding requirements.®The BENCHMARK 800-III ICP tool is a plasma tool that can be used in research, process development orlow volume production for precise etching and deposition on ...
BENCHMARK 800-III®ICP ETCH and DEPOSITION THEAFFORDABLEHIGH-PERFORMANCEDRIEANDLOWTREARUTMEEPPECVD PLASMAPROCESSINGSYSTEMS
The BenchMark 800®lylepuoCInductiv-IIIPlasma (ICP) Processing System from A defines a new concept in Deep Reactiv (DRIE) and low temperature-low damag Enhanced Chemical Vapor Depositio PECVD) plasma processing. The system on a modular design starting with a unive ber and cabinet unit with ICP etch and d bottom electrodes available for easy inst the chamber unit. We are confident you the ease of use, variety of plasma proce ability and attractive pricing of the BENC 800-III®unsurpassed by any other plas uct in the market. SYSTEM DESCRIPTION In the research and development of pl cessing, there has always been a great highly versatile and reliable tool. With changing requirements in plasma resear tem selected must offer the widest rang parameters and a high degree of repea process verification. It also must be ea fied for new process requirements. We b our BENCHMARK 800-I®IIICP etch/deposition plasma system satisfies these very demanding r The BENCHMARK 800-I®plasma tool that can be used in research, process devIIICP tool is a low volume production for precise etching and deposition on substrates up to 8" in diameter. accommodate pieces of wafer. In designing the BENCHMARK 80®mhttaincroteeasateysriditcewevtsal,ttoorimehep-0IPCIII the quality, reliability and process control capabilities of dedicated production-oriented syste reducing cost, maintenance and floor space requirements. The BENCHMARK 800-I®IIICP tool’s unique cabinet and electrode design allows for easy inst laminar flow module or cleanroom. Selection of proven, quality components, modular suba chamber and electrode design, compact size, automation and field proven process recipes ma MARK 800-II®I ICP tool the plasma engineer’s “system of choice”. FEATURES APPLICATIONS Single-piece chamber constructionDRIE 1,000W, 13.56MHz RF ICP PowerHigh rate and low damage etching 600W, 13.56 MHz RF Bias PowerSubmicron etching Auto RF matchingLow temperature-low damage Downstream pressure control PECVD of2SiOandS3iN4 Computer control with Windows 2000 operating sooPylmidietehcgintferaw Pumping: Mechanical and turbo pumps for etching;Passivation etching mechanical pump with roots blower for depositaCnobrtionopiseedtnoobiunna Field proven componentsAR Proven process recipes Endpoint detection (optional) SpecializedThinFilmEquipment X-Ray,LaserandPlasma
BENCHMARK 800®-III ICP
APPLICATIONSway, the ion energy enegstihtiWfprocessingmodorsusleceitnooantycesheiluhtt,nEeBise-nHodCN MARK 800-III®eofrangsmaplaeisitfsaodarbissecorpnocgn.lytnedtrolsaconheT-aCPIednidelidep tions, from sophisticated submicron RIE etching to deposition of high qualityPECVDfilmsatlowtemperature.ttheennparoisceseparhaatedbf Workingcloselywithourlargecustomerbase,wehavaecdeeravemliocpssewdicndmw,e field-provenprocessrecipes,guaranteeingthatyoursystemwillbeupo andrunningfromthedayyouinstallit.Onlythehightshepsehtearqinucteaplnirtneysasiusreatoautt subcomponentsareusedinmanufacture,ensuringthatyoofutrhBeEpNlCasH-maenvi MARK 800-II®llivorpotwloIrtne-ileriblepossime,upthtediesetihhg ability, repeatability and serviceability.PmRO.CESS SPECIFICATIONS The popularity of the BENCHMARK 8®0lootCPIIII0--irpeudsiPUThMePIsNysGtem is s marily to its attractive cost of ownership and a highly versatile design, providingfeaturesandprocessbenefitsnotfoundonmpalonrutdsebidwisytsthmechani.silahcmneapiwpmuootsthrspmupotceorfme;nghi Theseincludeasmallfootprintforlaminarflowinstallatioforsdaednmthleuse-puevaiaallbioitVn.ospsezifooirassuc tiple electrode configurations. Substrates up to 8" in diamet r can be mps are processed. the required vacuum processing levels. BASE SYSTEM PRESSURE CONTROL Basic components in the BENCHMARK®I-008PICAoIdIncioltolucdesesonwtslisntrovideproperermaeocssrutomrofdcerperooppressureconor.lAlcsodelonclortsysmetisi aWindowsbasedPCcontrollerwithrecipestorage,4chacbnentewlseennfdtihgei-processchamberandpsspump.Thesy tal mass flow control with expansion of up to 6 channels, temperature roce compensatedcapacitancemanometerformeasuremecnltudoefapr1o0c0emssmservovalveandpressurecontrollerconnec vacuum,100mmvacuumplumbingformaximumprocecpslaseptagecaiastuactnoocnme-amtiaonnoomftehteerpirnotcheessprporceessssurceh.amberproviding ductance, KF or ISO fittings for ease of service, plus many other pro-cessing and service features. Gas lines are stainless steelCwOitNhTVRCORLcLoEn-R nections. A Pentium computer is employed for complete system c PROCESS CHAMBER CompleteThis includes a hard drive and CD ROM. Windows The BENCHMARK 800-I®IIIPCtoo’lsnaodizedaluminumt-woacrropentusiequipsmoefntwlopseoifdprsaglnmyilwudint cesschamberisconstructedfromaunique“single-piecelv”oiddgei.gsdenigtumotacioramunbeoperatedinancamteyssheTckinerPloICintns.temdys,naaregsotupetndacirespe, etch and deposition systems use the same chamber sign. The a chamber’s upper portion contains the ICP coil and ceramOiPcTwIiOndNoSw. Thelowerportioncontainsthesubstrateelectrode,thevacTuoufumrtphuermipn-creaseitscapabilities,theBENCHMA®RK 800-ingport,andallnecessaryvalvesandvacuummonitorinICgPetqouoilpomffeenrts.abroadselectionofavailableprocessingopt Anautomatichoistraisestheupperportionofthechamclbuedrinfgoreenadspyointdetection,waterchillers,oilfiltrationandaccess to the lower electrode. systems. Exhaust gas abatement systems can also be sup ELECTRODES The ICP coil and ceramic window are the same for both ICP etch and deposition systems. The ICP etch electrode is specially designed for maximDWIuidMmtEhNp:eS4rI6fOoN5r"-Sm)8c11( manceinthelowervacuumranges.Thestainlesssteelbottom.elec-trode is temperature controlled via an optional recirculatiCDneagpbicnthehi:ltl3eH7r.ea5igd"nht3:)19mc6("mc59() supplied with a dark space shield, containing the plasma between the ICP coil and bottom electrode.htWeiglaHTto:ei3g5h0t:oisngnootp-c7)m("3145inndpede(g)7k22-951(.sbl005 The ICP PECVD bottom electrode is of similar design; however, it is capable of being heated to 400ºC.UTILITIES PLASMA SOURCEstem:Pp:umSy23060,,Hz0V23,zHA025,V06/0noylacl)mps10Ahani(mec 1,000W13.56MHzRFtotheICPantennaproducesaplasmad2e2n-0V,50Hz,5Ams sity up 5 x11e0V/cm3 in p(in argon plasma) at a low plasma potential while the second 600W 13.56MHz RF power supply poweAWris:arttehre:sub-ooling1.5gal/noit08(isp)orFalvoverapeeleroFcedortcm(075Fº) strate electrode for RF biasing. All power sources are solid state and air-cooled. Also supplied are automatic matching netwoGNr2a:kss:isth.nItnevrebmahcroFi)ps02-15(es,ssagcoserPstingfitVCR ARGi3nian4995054•lara,CASnaatCSrtee,ta.ww.cixmocr@teicaxom.cw•AMSALP•804:xaF1-:elT4•080ia:lEM-mtsapso80••94•052 Specifications subject to change without noticevs. 02-28-05