Low Temperature Epitaxy of Silicon by Electron-Beam Evaporation for Polycrystalline Silicon Thin Film Solar Cells [Elektronische Ressource] / Pinar Dogan. Betreuer: Bernd Rech
LOW TEMPERATURE EPITAXY OF SILICON BY ELECTRON-BEAM EVAPORATION FOR POLYCRYSTALLINE SILICON THIN FILM SOLAR CELLS vorgelegt von Master of Science Pınar Doğan aus Đzmir Von der Fakultät IV- Elektrotechnik und Informatik der Technischen Universität Berlin zur Erlangung des akademischen Grades Doktor der Naturwissenschaften Dr. rer. nat. genehmigte Dissertation Promotionsausschuss: Vorsitzender: Herr. Prof. Dr. Stephan Völker Berichter: Herr. Prof. Dr. Bernd Rech Berichter: Herr. Prof. Dr. Jörg Müller (TU Hamburg-Harburg) Berichter: Herr. Prof. Dr. Norbert Nickel Tag der wissenschaftlichen Aussprache: 07.12.2011 Berlin 2011 D83 2 3 ACHNOWLEDGEMENTS I would like to take this opportunity to thank to my advisors, colleagues and friends who played a role in my life during the preparation of this thesis. Prof. Bernd Rech for supervising my thesis, for his ideas about the experiments and for his full support to finish my thesis successfully. Prof. Jörg Müller for showing interest in this work and for agreeing to be the second Professor for the thesis defense jury. Prof. Norbert Nickel for sharing his expertise about Raman measurements, for agreeing to be in the thesis defense jury and for the final proof reading of the thesis. Dr.