Silicon nanowire transistor arrays for biomolecular detection [Elektronische Ressource] / Xuan Thang Vu

X.T.Vu

Sujets

• Physik

Informations

• Publié par: rheinisch-westfalischen_technischen_hochschule_-rwth-_aachen
• Publié le: 01 janvier 2011
• Nombre de lectures: 55
• Langue: Deutsch
• Poids de l'ouvrage: 8 Mo

Extrait

Silicon nanowire transistor arrays for
biomolecular detection



Von der Fakultät für Mathematik, Informatik und Naturwissenschaften der RWTH Aachen
University zur Erlangung des akademischen Grades eines Doktors der
Naturwissenschaften genehmigte Dissertation

vorgelegt von
Master of Materials Science
Xuan Thang Vu
aus Thaibinh, Vietnam

Berichter: Universitätsprofessor Dr. rer. nat. Andreas Offenhäusser
Universitätsprofessor Dr. rer. nat. Wilfried Mokwa

Tag der mündlichen Prüfung: 07 September 2011


Diese Dissertation ist auf den Internetseiten der Hochschulbibliothek online verfügbar.


Schriften des Forschungszentrums Jülich
Reihe Schlüsseltechnologien / Key Technologies Band / Volume 29Forschungszentrum Jülich GmbH
Peter Grünberg Institute (PGI)
Bioelectronic (PGI-8)
Silicon nanowire transistor arrays for
biomolecular detection
Xuan Thang Vu
Schriften des Forschungszentrums Jülich
Reihe Schlüsseltechnologien / Key Technologies Band / Volume 29
ISSN 1866-1807 ISBN 978-3-89336-739-9Bibliographic information published by the Deutsche Nationalbibliothek.
The Deutsche Nationalbibliothek lists this publication in the Deutsche
Nationalbibliografie; detailed bibliographic data are available in the
Internet at http://dnb.d-nb.de.
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Copyright: Forschungszentrum Jülich 2011
Schriften des Forschungszentrums Jülich
Reihe Schlüsseltechnologien / Key Technologies Band / Volume 29
D 82 (Diss., RWTH Aachen University, 2011)
ISSN 1866-1807
ISBN 978-3-89336-739-9
The complete volume ist freely available on the Internet on the Jülicher Open Access Server (JUWEL) at
http://www.fz-juelich.de/zb/juwel
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Dedicated to my wife and my daughters











































Abstract
Biosensors based on nano-scale electronic devices have the potential to achieve exquisite
sensitivity for the direct detection of biomolecular interactions. Silicon nanowire field-
effect transistor (SiNW-FET) is the most promising candidates for these purposes because
of their biocompatibility, very high surface-to-volume ratio, fast response, and good
reliability of the signal. In the last few years, several promising results based on SiNW
sensors, which were either fabricated by -“dotopwn” or “bottom -up” methods, hae vbeen
reported, such as biosensors for protein binding, DNA hybridization or the detection of
extracellular signals from electrogenic cell.
The aim of this work was to fabricate SiNW arrays in a large scale with robust methods
and then apply for the detection of biomolecules. To achieve these tasks, we have
developed a novel “-topdown” approach for wa-scferale processes of SiNW arrays based
on a combination of two technologies: the novel and high throughput nanoimprint
lithography and wet anisotropic etching of silicon. Devices were fabricated at the clean
room facility at the Institute of Bio- and Nanosystems (IBN), Research Center Juelich,
Germany. By our approach, the dimensions of the SiNWs can simply be tuned using
different etching times of the sub-processes. This process offers a large dimension control
of the desired nanowire structures without using an expensive mask or highly complicated
nanostructuring of the devices. For the full fabrication process, we employed thermal
nanoimprint lithography and anisotropic etching of Si by tetramethylammonium hydroxide
(TMAH) in combination with other micro-fabrication techniques such as wet etching, dry
etching and photolithography to create the SiNW array sensors. Two complete fabrication
rounds were finalized including top-down structuring, implantation and silicidation of
contact lines, passivation of the devices with a high quality SiO layer deposited by a “low 2
pressure chemical vapor deposition” (LPCVD) pr octo essnable device operation in liquid
environments, gate oxide formation, metallization. Finally, chips were wire bonded and
encapsulated with epoxy glue enabling stable and reliable operation within electrolyte
environments. Main advantages of our fabrication protocol are that the sensors could
achieve high sensitivity, while possible mass production and reproducibility of the devices
are guaranteed. The chip designs were based on either 4×4 arrays for the first round or
28×2 arrays for the second round
i