The Waveguide Electromagnetic Field Solver and its Extension and Application to Lithography Simulation [Elektronische Ressource] = Die Wellenleiterlösungsmethode für elektromagnetische Felder und ihre Erweiterung und Anwendung auf die Lithographiesimulation / Feng Shao. Betreuer: Heiner Ryssel

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The Waveguide Electromagnetic FieldSolver and its Extension andApplication to Lithography SimulationDie Wellenleiterl¨osungsmethode fur¨ elektromagnetische Felder und ihreErweiterung und Anwendung auf die LithographiesimulationDer Technischen Fakult¨at derFriedrich-Alexander-Universit¨atErlangen-Nurn¨ bergzur Erlangung des GradesD O K T O R - I N G E N I E U Rpresented byFeng ShaoErlangen, 2011Als Dissertation genehmigt vonder Technischen Fakult¨at derUniversit¨at Erlangen-Nurn¨ bergTag der Einreichung: 04. Juli 2011Tag der Promotion: 29. November 2011Dekan: Prof. Dr.-Ing. Marion MerkleinBerichterstatter: Prof. Heiner RysselProf. Dr. Ulf PeschelAcknowledgmentsThe work of my thesis and the life at Fraunhofer IISB would be much more difficultwithoutthehelpandencouragementfrommysupervisors,colleagues,andmanyfriends.First of all, I would like to thank my supervisor Prof. Dr. Heiner Ryssel for his kindguidance during my research and writing of this thesis. I would also like to thank Prof.Dr. Ulf Peschel for his careful co-examination on this thesis and his remarks on thetheory of this work.Many thanks are directed to Dr. Andreas Erdmann. His kind supervision andeducationhavepresentedthelithographysimulationworldtome. Forallthepastyears,his continuing encouragement and patience have been supporting and enlightening me.I would also like to thank Dr. Jurgen¨ Lorenz for his support and management formy work at Fraunhofer IISB.

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• Publié par: friedrich-alexander-universitat_erlangen-nurnberg
• Publié le: 01 janvier 2011
• Nombre de lectures: 35
• Langue: English
• Poids de l'ouvrage: 16 Mo

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